Edwards Announces Vacuum Pumps for LED and Compound Semiconductor Manufacturing

The iXH645H offers very high airflow and is capable of continuous operation at the high loads required by the latest generation of LED manufacturing equipment. The iXH series of dry pumps use advanced technology to minimize maintenance requirements and maximize uptime, helping to reduce costs.

Shao Wei, LED market manager of Edwards, said: "The new members of the iXH series of dry pumps are designed to meet the needs of two fast-growing high-tech manufacturing segments. Due to the excellent lighting efficiency, LED lighting products are increasingly seen as An environmentally friendly alternative to incandescent lighting, we see that China, South Korea, Japan and the United Kingdom have recently passed legislation that will phase out traditional high-power lighting products."

Shao Wei added: "At the same time, the use of III-V materials in compound semiconductor manufacturing is driving Moore's Law to the next generation of design nodes."

LED and compound semiconductor manufacturing processes typically use high flow helium and highly corrosive ammonia. The iXH645H has been designed to meet these requirements, with excellent hydrogen evacuation and corrosion resistant design, including a patented nitrogen purge barrier that protects pump seals. The XH645 pump has high temperature capability to help prevent possible condensation of phosphorus compounds. In addition, the pump's advanced oil lubrication and sealing technology eliminates the need for regular maintenance, while its heat dissipation and motor design prevent overheating, motor overload or limited work area. The optimized temperature control system of the iXH645H pump ensures that the pump is ready for the process in approximately 30 minutes of start-up time.

In addition, Edwards will participate in the InterSolar and SEMICON/West exhibitions in San Francisco, California, July 10-12, 2012. The iXH series will also be on display at booths 5351 at the two exhibitions.